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		Science and engineering of microelectronic fabrication / by Stephen A. Campbell by Campbell, Stephen A. Series: Oxford series in electrical engineeringMaterial type: Text; Format: print ; Literary form: Not fiction Language: English Publication details: New York : Oxford University Press, 1996; Oxford : Oxford University Press, 2001Availability: Items available for loan: Main Library (2) Call number: 621.3817 CAM, ... Place hold
		The science and engineering of microelectronic fabrication / by Stephen A. Campbell by Campbell, Stephen A. Edition: 2nd ed.Material type: Text; Format: print ; Literary form: Not fiction Language: English Publication details: New York : Oxford University Press, 2003Availability: Items available for loan: Main Library (1) Call number: 621.381 CAM. Place hold